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Palladium Hydrogen Purifiers - PS7-PD2 (1,085 - 2,170 slpm)

SAES Pure Gas Palladium Hydrogen Purifiers produce the purest hydrogen on the planet. The patented Micro-Channel design offer the most significant innovation in hydrogen gas purification in over 20 years. The advanced Hydrogen purifier offers higher flow capacity with lower cost and improved durability for high-volume manufacturing processes. SAES Pure Gas Hydrogen purifiers deliver 9N's (99.9999999%) purity with typical levels.

The PS7-PD2 includes two Palladium cells in parallel, in a compact enclosure for a wide range of flows for bulk gas supply of many process tools at large LED and semiconductor fabs. The dual Palladium cells purify the entire inlet Hydrogen flow. The enclosure is suited for installation near the process tools or in a bulk gas room.

Palladium Membrane Diffusion - How it Works

Purification of hydrogen by palladium (Pd) membrane diffusion is the accepted technology for applications requiring part-per-billion gas purity. Palladium acts as a catalyst, causing hydrogen gas molecules to dissociate into atoms upon contacting the membrane surface. The atoms are small enough to diffuse through the palladium membrane, driven by differential hydrogen pressure across the membrane. The hydrogen atoms recombine into molecules after passing through the membrane. Hydrogen purifiers operate at approximately 400°C. At this temperature, only hydrogen atoms readily diffuse through the membranes. No other impurities can diffuse through the palladium membrane.

Impurities including H2O, O2, CO, CO2, N2, He, Ar, and THC (Total Hydrocarbons including CH4) impurities remain on the inlet side of the membrane and are continuously purged through a bleed connection. The unique properties of palladium provide a solid barrier with no breakthrough as compared to catalysts and getters that rely on chemical reactions on reactive surface areas. A nitrogen purge system is included to purge the purifier at startup and during any shutdown.

Key Features

  • Ultra-pure hydrogen from any source
  • < 99.9999999% purity; < 1 ppb total impurities
  • Patented palladium micro-channel technology
  • High flow capacity up to 2,170 slpm (70 Nm3/hr.)
  • Lowest power consumption
  • Smallest footprint
  • Nitrogen purge system
  • 5.0" Color touchscreen HMI with PLC

Palladium Advantages

  • Only hydrogen passes through to the pure side - the purest gas
  • Every impurity is removed - no exceptions
  • Unlimited lifetime - non-consumable technology
  • Separates pure H2 from source gas with ppm or % level impurities
  • Easy to verify performance with in-situ helium leak test


  • GaN epitaxy
  • Silicon carbide (SiC) epitaxy
  • Photovoltaics
  • Polysilicon production
  • Semiconductor
  • Fiber optic processes
  • Fuel cells

MegaTorr PS7-PD2 Palladium Purifier

Two Pd Cell

Typical Flow Rate
260 psig inlet pressure
80 psig outlet pressure
slpm Nm3/hr
PS7-PD2-35 676 40.6
PS7-PD2-40 773 46.4
PS7-PD2-45 870 52.2
PS7-PD2-50 966 58.0
PS7-PD2-55 1,063 63.8
PS7-PD2-60 1,160 69.6
PS7-PD2-65 1,256 75.4
PS7-PD2-70 1,353 81.2
Other models available

For more information, click here to view the Brochure pdf.