Point of use Purifiers:

Rare Gases and Nitrogen
Hydrogen
Clean Dry Air (CDA) and Oxygen
Dryer (H2O Removal)
Weld and Purge Gases
Corrosive and Specialty Gases
Ammonia and DMHz
Carbon Dioxide, Acetylene

Bulk Gas Purification:

CDA (Clean Dry Air) [PS22]
Nitrogen [PS8]
Nitrogen with CH4 Removal [PS9]
Rare Gas [PS5]
Hydrogen [PS7-A]
Hydrogen with N2 and CH4 Removal, 5N [PS7-H]
Hydrogen with N2 and CH4 Removal, 6N [PS7-G]
Oxygen [PS6]
Ammonia [PS21]
Factory Regenerable [PS14]

Palladium Hydrogen Purifiers:

Palladium Hydrogen Purifiers - PS7-PD05
Palladium Hydrogen Purifiers - PS7-PD1
Palladium Hydrogen Purifiers - PS7-PD2

The MegaTorr® MGT Series Nitrogen purifiers are enhanced, optimized designs providing sub-ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra-High Purity (UHP) piping design, advanced process material analysis and state of the art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability and high performance. The PS8 series uses dual adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications. Outlet impurity levels for CO, CO₂, H2, H₂O and O₂ are reduced to below parts per billion (ppb) levels.

Adsorber vessels alternate between purify and regeneration modes, providing continuous purification in a single process to remove the impurities to sub ppb levels. Adsorber regeneration is accomplished by back-flushing with a mixture of purified process gas and low concentration hydrogen at an elevated temperature.

The PS8 platform can be manufactured to flow 5 Nm³/hr to 20,000 Nm³/hr.

FEATURES

STANDARD FEATURES

• Automated Microprocessor Controller
• HMI (Human Machine Interface)
• System Alarms
• Electric Gas Preheaters
• Closed-Loop Temperature Controls
• All Metal Cabinet with Doors
• Hydrogen Blending Station

CUSTOMER INTERFACE CONNECTIONS

• Alarm Relay - fail safe relay contacts allow remote detection of alarm condition.
• Remote Contact Shutdown - allows remote shutdown of the purifier.

OPTIONAL EQUIPMENT

• Inlet & Outlet Isolation Valves
• Mass flow meter with 4-20mA Output
• Inlet & Outlet Pressure Transducers
• Instrument Air Management System
• Air Cooled Heat Exchanger
• High Temperature Hardware Interlock
• Over Pressurization Safety Relief System
• Auto or Manual Bypass
• Particle Filter
• Separate Control Power
• MODBUS Data Communication Port

PS8 Performance
Gas Purified	Impurities Removed	Outlet Performance
N2	H2O, O2, CO, CO2, H2	< 1 ppb
Note: Purifiers are gas specific and should only be used for the gas indicated

PS8 Specifications
Model	Maximum Flow (Nm3/hr)	Average Power Consumption (kW)	Maximum Pressure Drop (bar)	Dimensions (cm)			Weight (kg)
				H	W	D
PS8-MGT10-N	10	0.2	0.7	115	53	30	50
PS8-MGS30-N	30	0.3	0.7	168	100	50	150
PS8-MGS60-N	60	0.5	1	150	84	43	120
PS8-MGS100-N	100	0.5	1	160	80	64	300
PS8-MGT200-N	200	0.28	0.7	193	132	135	1500
PS8-MGT300-N	300	0.28	1	193	132	135	1500
PS8-MGT400-N	400	0.35	0.7	239	191	236	2300
PS8-MGT500-N	500	0.42	0.7	239	191	236	2300
PS8-MGT600-N	600	0.48	0.7	239	191	236	2300
PS8-MGT700-N	700	0.54	0.7	239	191	236	2300
PS8-MGT800-N	800	0.58	0.7	239	191	236	2300
PS8-MGT1000-N	1000	0.65	0.7	209	191	236	2300
PS8-MGT1200-N	1200	0.7	0.7	265	252	262	5217
PS8-MGT1500-N	1500	0.85	0.7	264	252	262	5217
PS8-MGT1800-N	1800	1	0.7	264	252	262	5217
PS8-MGT2000-N	2000	1.3	0.7	264	252	262	5500
PS8-MGT2500-N	2500	1.3	0.7	264	252	262	5557
PS8-MGT3000-N	3000	1.3	0.7	264	252	262	5557
PS8-MGT4000-N	4000	2.5	0.7	267	252	467	10433
PS8-MGT5000-N	5000	2.5	0.7	267	252	467	10433
PS8-MGT6000-N	6000	2.5	0.8	267	252	467	10433
PS8-MGT7000-N	7000	3.8	0.7	267	252	467	11567
PS8-MGT8000-N	8000	3.8	0.7	267	252	467	11567
PS8-MGT9000-N	9000	3.8	1	267	252	467	11567
PS8-MGT10000-N	10000	3.8	1	267	252	467	11567
Other flow rates available, please consult the factory for details.

Pictures (click to enlarge)

Qui vannno inserite tutte le immagini.