Point of use Purifiers:Rare Gases and Nitrogen
Clean Dry Air (CDA) and Oxygen
Dryer (H2O Removal)
Weld and Purge Gases
Corrosive and Specialty Gases
Ammonia and DMHz
Carbon Dioxide, Acetylene
Bulk Gas Purification:CDA (Clean Dry Air) [PS22]
Nitrogen with CH4 Removal [PS9]
Rare Gas [PS5]
Hydrogen with N2 and CH4 Removal, 5N [PS7-H]
Hydrogen with N2 and CH4 Removal, 6N [PS7-G]
Factory Regenerable [PS14]
Palladium Hydrogen Purifiers:Palladium Hydrogen Purifiers - PS7-PD05
Palladium Hydrogen Purifiers - PS7-PD1
Palladium Hydrogen Purifiers - PS7-PD2
PS8 NITROGEN PURIFIER
The MegaTorr® MGT Series Nitrogen purifiers are enhanced, optimized designs providing sub-ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra-High Purity (UHP) piping design, advanced process material analysis and state of the art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability and high performance. The PS8 series uses dual adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications. Outlet impurity levels for CO, CO2, H2, H2O and O2 are reduced to below parts per billion (ppb) levels.
Adsorber vessels alternate between purify and regeneration modes, providing continuous purification in a single process to remove the impurities to sub ppb levels. Adsorber regeneration is accomplished by back-flushing with a mixture of purified process gas and low concentration hydrogen at an elevated temperature.
The PS8 platform can be manufactured to flow 5 Nm3/hr to 20,000 Nm3/hr.
CUSTOMER INTERFACE CONNECTIONS
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