Point of use Purifiers:Rare Gases and Nitrogen
Clean Dry Air (CDA) and Oxygen
Dryer (H2O Removal)
Weld and Purge Gases
Corrosive and Specialty Gases
Ammonia and DMHz
Carbon Dioxide, Acetylene
Bulk Gas Purification:CDA (Clean Dry Air) [PS22]
Nitrogen with CH4 Removal [PS9]
Rare Gas [PS5]
Hydrogen with N2 and CH4 Removal, 5N [PS7-H]
Hydrogen with N2 and CH4 Removal, 6N [PS7-G]
Factory Regenerable [PS14]
Palladium Hydrogen Purifiers:Palladium Hydrogen Purifiers - PS7-PD05
Palladium Hydrogen Purifiers - PS7-PD1
Palladium Hydrogen Purifiers - PS7-PD2
PS9 Nitrogen Purifier with Methane removal
The MegaTorr® Series Nitrogen Purifiers are enhanced, optimized designs providing sub-ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra High Purity (UHP) piping design, advanced process material analysis and state of the art integrated control systems to develop this new family of purifiers to meet the needs of low capital cost, high reliability and high performance. The PS9 series uses dual catalytic and adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications. Outlet impurity levels for CH4, CO, CO2, H2, H2O and O2 are reduced to below parts per billion (ppb) levels.
Hydrocarbons (CH4), CO and H2 eact at elevated temperatures with O2 or CDA in the oxidizing catalyst vessel to form CO2 and H2O which, along with O2, are then removed in the ambient temperature adsorber vessels. Adsorber vessels alternate between purify and regeneration modes, providing continuous purification. Adsorber regeneration is accomplished by backflushing with a mixture of purified process gas and low concentration hydrogen at an elevated temperature.
The PS9 platform can be manufactured to flow rates from 15 Nm3/hr. to 3,000 Nm3/hr.
CUSTOMER INTERFACE CONNECTIONS
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