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The MegaTorr® MGT Series Oxygen Gas Purifiers are enhanced, optimized designs providing sub-ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra-High Purity (UHP) piping design, advanced process material analysis, and state of the art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability and high performance.

The PS6 series uses catalytic and adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications. Outlet impurity levels for CO, CO2, CH4, H2, and H2O, are reduced to below parts per billion (ppb) levels.

Hydrocarbons (CH4), CO and H2 react at elevated temperatures with O2 in the oxidizing catalyst vessel to form CO2 and H2O which are then removed in the ambient temperature downstream adsorber vessels. Adsorber vessels alternate between purify and regeneration modes, providing continuous purification. Adsorber regeneration is accomplished by backflushing with purified oxygen at elevated temperatures.


  • Automated Microprocessor Controller
  • HMI (Human Machine Interface)
  • System Alarms
  • Gas to Gas Heat Exchanger
  • Electric Gas Preheaters
  • Closed-Loop Temperature Controls
  • All Metal Cabinet with Doors

  • Alarm Relay - fail safe relay contacts allow remote detection of alarm condition.
  • Remote Contact Shutdown - allows remote shutdown of the purifier.

  • Inlet & Outlet Isolation Valves
  • Mass flow meter with 4-20mA Output
  • Inlet & Outlet Pressure Transducers
  • Instrument Air Management System
  • Air Cooled Heat Exchanger
  • High Temperature Hardware Interlock
  • Over Pressurization Safety Relief System
  • Auto or Manual Bypass
  • Particle Filter
  • Separate Control Power
  • MODBUS Data Communication Port

PS6 Performance

Gas Purified Impurities Removed Outlet Performance
O2 H2O, CO, CO2, H2, CH4 < 1 ppb
Note: Purifiers are gas specific and should only be used for the gas indicated

PS6 Specifications

 Model Maximum Flow (Nm3/hr) Average Power Consumption (kW) Maximum Pressure Drop (bar) Dimensions (cm) Weight (kg)
 PS6-MGT15-O 15 1.4 0.7 193 89 84 600
 PS6-MGT30-O 30 2.3 0.7 193 89 84 600
 PS6-MGT60-O 60 3.2 0.7 193 89 84 600
 PS6-MGT100-O 100 5.9 0.7 193 132 135 1700
 PS6-MGT200-O 200 9.1 0.7 193 132 135 1700

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