Point of use Purifiers:Rare Gases and Nitrogen
Clean Dry Air (CDA) and Oxygen
Dryer (H2O Removal)
Weld and Purge Gases
Corrosive and Specialty Gases
Ammonia and DMHz
Carbon Dioxide, Acetylene
Bulk Gas Purification:CDA (Clean Dry Air) [PS22]
Nitrogen with CH4 Removal [PS9]
Rare Gas [PS5]
Hydrogen with N2 and CH4 Removal, 5N [PS7-H]
Hydrogen with N2 and CH4 Removal, 6N [PS7-G]
Factory Regenerable [PS14]
Palladium Hydrogen Purifiers:Palladium Hydrogen Purifiers - PS7-PD05
Palladium Hydrogen Purifiers - PS7-PD1
Palladium Hydrogen Purifiers - PS7-PD2
PS21 Ammonia Purifier
The MegaTorr® MGT Series Ammonia Purifiers are enhanced, optimized designs providing sub ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra High Purity piping design, advanced process material analysis, and state of the art integrated control systems to develop this new family of purifiers to meet the needs of low capital cost, high reliability and high performance.
The PS21 series uses dual catalytic and adsorption processes, designed specifically to provide ultra-high purity (UHP) gas for semiconductor applications. Outlet impurity levels for H2O, and 02 are reduced to below parts per billion (ppb) levels. Adsorber vessels alternate between purify and regeneration mode providing continuous purification in a single process to remove the impurities to sub ppb levels. Adsorber regeneration is accomplished by back-flushing with a mixture of purified nitrogen and low concentration hydrogen at an elevated temperature. The regenerated vessel is then reconditioned with NH3 prior to placing it back into service.
Pictures (click to enlarge)Qui vannno inserite tutte le immagini.