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PS21 Ammonia Purifier

The MegaTorr® MGT Series Ammonia Purifiers are enhanced, optimized designs providing sub ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra High Purity piping design, advanced process material analysis, and state of the art integrated control systems to develop this new family of purifiers to meet the needs of low capital cost, high reliability and high performance.

The PS21 series uses dual catalytic and adsorption processes, designed specifically to provide ultra-high purity (UHP) gas for semiconductor applications. Outlet impurity levels for H2O, and 02 are reduced to below parts per billion (ppb) levels. Adsorber vessels alternate between purify and regeneration mode providing continuous purification in a single process to remove the impurities to sub ppb levels. Adsorber regeneration is accomplished by back-flushing with a mixture of purified nitrogen and low concentration hydrogen at an elevated temperature. The regenerated vessel is then reconditioned with NH3 prior to placing it back into service.


  • Fully Automated Microprocessor Controller
  • HMI (Human Machine Interface)
  • Electric Gas Preheaters
  • Ammonia Detection Sensor
  • Vented Cabinet Purge
  • Closed-Loop Temperature Controls
  • Remote Contact Shutdown
  • All Metal Enclosure with Doors
  • Regeneration Blending Station
  • Air Cooled Heat Exchanger
  • Over Pressurization Safety System

  • Inlet and outlet isolation valves
  • Inlet Mass Flow Meter with 4–20 mA Isolated Analog Output
  • Inlet and Outlet Pressure Transducers w/4–20 mA Isolated Analog Output
  • High Temperature Hardware Interlock
  • Auto or Manual Bypass
  • Particle Filter • Separate Control Power
  • MODBUS Data communication port
  • Ground Fault Protection (GFI)
  • Emergency Off (EMO) Button
  • Purifier Hold Down Brackets
  • Uninterruptible Power Supply (UPS)
  • CE Marking

PS21 Performance

Gas Purified Impurities Removed Outlet Performance
NH3 H2O, O2 < 1 ppb
Note: Purifiers are gas specific and should only be used for the gas indicated

PS21 Specifications

 Model Maximum Flow (Nm3/hr) Average Power Consumption (W) Maximum Pressure Drop (bar) Dimensions (cm) Weight (kg)
PS21-MGT20-NH3 20 200 0.7 196 89 86 500
PS21-MGT40-NH3 40 500 0.7 196 89 86 500

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