Point of use Purifiers:

Rare Gases and Nitrogen
Hydrogen
Clean Dry Air (CDA) and Oxygen
Dryer (H2O Removal)
Weld and Purge Gases
Corrosive and Specialty Gases
Ammonia and DMHz
Carbon Dioxide, Acetylene

Bulk Gas Purification:

CDA (Clean Dry Air) [PS22]
Nitrogen [PS8]
Nitrogen with CH4 Removal [PS9]
Rare Gas [PS5]
Hydrogen [PS7-A]
Hydrogen with N2 and CH4 Removal, 5N [PS7-H]
Hydrogen with N2 and CH4 Removal, 6N [PS7-G]
Oxygen [PS6]
Ammonia [PS21]
Factory Regenerable [PS14]

Palladium Hydrogen Purifiers:

Palladium Hydrogen Purifiers - PS7-PD05
Palladium Hydrogen Purifiers - PS7-PD1
Palladium Hydrogen Purifiers - PS7-PD2

The MegaTorr® MGT Series Ammonia Purifiers are enhanced, optimized designs providing sub ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra High Purity piping design, advanced process material analysis, and state of the art integrated control systems to develop this new family of purifiers to meet the needs of low capital cost, high reliability and high performance.

The PS21 series uses dual catalytic and adsorption processes, designed specifically to provide ultra-high purity (UHP) gas for semiconductor applications. Outlet impurity levels for H₂O, and 0₂ are reduced to below parts per billion (ppb) levels. Adsorber vessels alternate between purify and regeneration mode providing continuous purification in a single process to remove the impurities to sub ppb levels. Adsorber regeneration is accomplished by back-flushing with a mixture of purified nitrogen and low concentration hydrogen at an elevated temperature. The regenerated vessel is then reconditioned with NH3 prior to placing it back into service.

FEATURES

STANDARD FEATURES

• Fully Automated Microprocessor Controller
• HMI (Human Machine Interface)
• Electric Gas Preheaters
• Ammonia Detection Sensor
• Vented Cabinet Purge
• Closed-Loop Temperature Controls
• Remote Contact Shutdown
• All Metal Enclosure with Doors
• Regeneration Blending Station
• Air Cooled Heat Exchanger
• Over Pressurization Safety System

OPTIONAL FEATURES

• Inlet and outlet isolation valves
• Inlet Mass Flow Meter with 4–20 mA Isolated Analog Output
• Inlet and Outlet Pressure Transducers w/4–20 mA Isolated Analog Output
• High Temperature Hardware Interlock
• Auto or Manual Bypass
• Particle Filter • Separate Control Power
• MODBUS Data communication port
• Ground Fault Protection (GFI)
• Emergency Off (EMO) Button
• Purifier Hold Down Brackets
• Uninterruptible Power Supply (UPS)
• CE Marking

PS21 Performance
Gas Purified	Impurities Removed	Outlet Performance
NH3	H2O, O2	< 1 ppb
Note: Purifiers are gas specific and should only be used for the gas indicated

PS21 Specifications
Model	Maximum Flow (Nm3/hr)	Average Power Consumption (W)	Maximum Pressure Drop (bar)	Dimensions (cm)			Weight (kg)
				H	W	D
PS21-MGT20-NH3	20	200	0.7	196	89	86	500
PS21-MGT40-NH3	40	500	0.7	196	89	86	500

Pictures (click to enlarge)

Qui vannno inserite tutte le immagini.