Point of use Purifiers:

Rare Gases and Nitrogen
Hydrogen
Clean Dry Air (CDA) and Oxygen
Dryer (H2O Removal)
Weld and Purge Gases
Corrosive and Specialty Gases
Ammonia and DMHz
Carbon Dioxide, Acetylene

Bulk Gas Purification:

CDA (Clean Dry Air) [PS22]
Nitrogen [PS8]
Nitrogen with CH4 Removal [PS9]
Rare Gas [PS5]
Hydrogen [PS7-A]
Hydrogen with N2 and CH4 Removal, 5N [PS7-H]
Hydrogen with N2 and CH4 Removal, 6N [PS7-G]
Oxygen [PS6]
Ammonia [PS21]
Factory Regenerable [PS14]

Palladium Hydrogen Purifiers:

Palladium Hydrogen Purifiers - PS7-PD05
Palladium Hydrogen Purifiers - PS7-PD1
Palladium Hydrogen Purifiers - PS7-PD2

The MegaTorr Hydrogen gas purifier with only adsorbers is ideal for applications where N₂ and CH₄ impurity removal is not required.

The MegaTorr Hydrogen gas purifier with only adsorbers utilizes catalytic and adsorption processes to provide ultra-high purity (UHP) gas for semiconductor applications. Outlet impurity levels for O₂, CO, CO₂, NMHC & H₂O are reduced to low parts per billion (ppb) levels.

The ambient temperature adsorber vessels remove O₂, CO, CO₂ and H₂O. The twin adsorber vessels alternate between purify and regeneration mode providing continuous purification. Regeneration is accomplished by backflushing with purified Hydrogen at elevated temperatures.

FEATURES

STANDARD FEATURES

• Automated Microprocessor Controller
• HMI (Human Machine Interface)
• Password Protected Control System
• System Alarms
• H₂ Leak Detection Sensor
• Vented Cabinet Purge
• Redundant Heating Elements
• Air Cooled Heat Exchanger

OPTIONAL FEATURES

• Inlet and Outlet Pressure Transducers
• Over Pressurization Safety Relief System
• High Temperature Hardware Interlocks
• Mass flow meter with 4-20mA Output
• Auto or Manual Bypass
• Instrument Air Management System
• Particle Filter
• Separate Control Power
• UPS - Uninterruptible Power Supply
• MODBUS Data Communication Port
• Inert Gas piping system purge

PS7 Adsorber Only - Performance
Gas Purified	Impurities Removed	Outlet Performance
H2	H2O, O2, CO, CO2, NMHC	< 1 ppb
Note: Purifiers are gas specific and should only be used for the gas indicated

PS7 Adsorber Only - Specification
Model	Maximum Flow (Nm3/hr)	Average Power Consumption (kW)	Maximum Pressure Drop (bar)	Dimensions (cm)			Weight (kg)
				H	W	D
PS7-MGT10-H-A	10	0.2	0.7	113	53	30	70
PS7-MGS30-H-A	30	0.3	0.7	168	100	50	150
PS7-MGS60-H-A	60	0.5	1	150	84	43	120
PS7-MGS100-H-A	100	0.5	1	160	80	64	300
PS7-MGT200-H-A	200	0.5	0.7	213	134	164	1361
Other flow rates available, please consult the factory for details.

Pictures (click to enlarge)

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