sigma logo


The MegaTorr Hydrogen gas purifier with only adsorbers is ideal for applications where N2 and CH4 impurity removal is not required.

The MegaTorr Hydrogen gas purifier with only adsorbers utilizes catalytic and adsorption processes to provide ultra-high purity (UHP) gas for semiconductor applications. Outlet impurity levels for O2, CO, CO2, NMHC & H2O are reduced to low parts per billion (ppb) levels.

The ambient temperature adsorber vessels remove O2, CO, CO2 and H2O. The twin adsorber vessels alternate between purify and regeneration mode providing continuous purification. Regeneration is accomplished by backflushing with purified Hydrogen at elevated temperatures.


  • Automated Microprocessor Controller
  • HMI (Human Machine Interface)
  • Password Protected Control System
  • System Alarms
  • H2 Leak Detection Sensor
  • Vented Cabinet Purge
  • Redundant Heating Elements
  • Air Cooled Heat Exchanger

  • Inlet and Outlet Pressure Transducers
  • Over Pressurization Safety Relief System
  • High Temperature Hardware Interlocks
  • Mass flow meter with 4-20mA Output
  • Auto or Manual Bypass
  • Instrument Air Management System
  • Particle Filter
  • Separate Control Power
  • UPS - Uninterruptible Power Supply
  • MODBUS Data Communication Port
  • Inert Gas piping system purge

PS7 Adsorber Only - Performance

Gas Purified Impurities Removed Outlet Performance
H2 H2O, O2, CO, CO2, NMHC < 1 ppb
Note: Purifiers are gas specific and should only be used for the gas indicated

PS7 Adsorber Only - Specification

 Model Maximum Flow (Nm3/hr) Average Power Consumption (kW) Maximum Pressure Drop (bar) Dimensions (cm) Weight (kg)
 PS7-MGT10-H-A 10 0.2 0.7 113 53 30 70
 PS7-MGS30-H-A 30 0.3 0.7 168 100 50 150
 PS7-MGS60-H-A 60 0.5 1 150 84 43 120
 PS7-MGS100-H-A 100 0.5 1 160 80 64 300
 PS7-MGT200-H-A 200 0.5 0.7 213 134 164 1361
Other flow rates available, please consult the factory for details.

Pictures (click to enlarge)

Qui vannno inserite tutte le immagini.