Point of use Purifiers:

The PS22 Series Gas Purifiers are enhanced, optimized designs providing sub-ppb performance. SAES Pure Gas has drawn on years of experience in Ultra-High Purity (UHP) piping design, advanced process material analysis and state of the art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability and high performance.

The PS22 series uses ambient temperature adsorption processes designed specifically to provide UHP gas for semiconductor applications. Outlet impurity levels for CO₂, H₂O and trace impurities including TOC’s (C7+), amines, ammonia, siloxanes, sulfurs, refractory compounds, phthalates, carboxylic acids and NOx, are reduced to below parts per billion (ppb) levels.

The risk of impurity breakthrough is minimized when using a regenerable, "self-cleaning" purifier, like the PS22, as opposed to a disposable, "fixed capacity" canister. Experience has shown that inlet impurities found in CDA, for example, can vary greatly depending on ambient atmospheric conditions.

FEATURES

STANDARD FEATURES

Auto regenerable
HMI touch screen display
Fully automated microprocessor controller
Flow rates available: 5 Nm³/hr - 10.000 Nm³/hr

GASES PURIFIED

CDA
Nitrogen
Oxygen
Inerts and O₂/inert mixtures

PERFORMANCE

Removes H₂O, CO₂, TOC_s, Acids, Bases, and trace impurities
< 10 ppt performance

PERFORMANCE

High Temperature Hardware Interlock for over-temperature protection independent of the control system.
Auto or Manual Bypass allows process gas flow to bypass the purifier vessels.
Particle Filter provides purified gas filtration using a TFE or metal element.
MODBUS Data Communication Port provides operational data output.
Ground Fault Protection (GFI) provides protection from electrical ground fault.
Emergency Off (EMO) Button provides control for an emergency stop.
Purifier Hold Down Brackets provide means for securing purifier to floor or wall.
Separate Control Power allows purifier control power by customer UPS separate from main purifier power.

PS22 Performance
Gas Purified	Impurities Removed	Outlet Performance
CDA	H₂O, CO₂	< 100 ppt
	TOC, Acids, Bases, Refractory Compounds	< 10 ppt
Note: Purifiers are gas specific and should only be used for the gas indicated

PS22 Specifications
Model	Maximum Flow (Nm3/hr)	Average Power Consumption (kW)	Maximum Pressure Drop (bar)	Dimensions (cm)			Weight (kg)
Model	Maximum Flow (Nm3/hr)	Average Power Consumption (kW)	Maximum Pressure Drop (bar)	H	W	D	Weight (kg)
PS22-MGT5-CDA	5	0.2	0.7	86	53	30	48
PS22-MGT10-CDA	10	0.2	0.7	86	53	30	48
PS22-MGT20-CDA	20	0.3	1	135	84	41	100
PS22-MGT25-CDA	25	0.3	1	135	84	41	100
PS22-MGT30-CDA	30	0.4	1	135	84	41	110
PS22-MGT40-CDA	40	0.4	1	135	84	41	110
PS22-MGT60-CDA	60	0.5	1	150	84	41	120
PS22-MGT100-CDA	100	0.5	1	196	132	135	1500
PS22-MGT150-CDA	150	0.5	0.7	193	132	135	1500
PS22-MGT200-CDA	200	0.5	0.7	193	132	135	1500
PS22-MGT300-CDA	300	0.5	0.7	193	132	135	1500
PS22-MGT600-CDA	600	1	1	209	148	196	3000
PS22-MGT1000-CDA	1000	0.7	0.7	239	191	236	2300
PS22-MGT1200-CDA	1200	1	0.7	239	191	236	2300
PS22-MGT1500-CDA	1500	1.5	0.7	239	191	236	2500
PS22-MGT1800-CDA	1800	1.5	0.7	239	191	236	2500
PS22-MGT2000-CDA	2000	1.5	1	264	252	262	5000
PS22-MGT3000-CDA	3000	2	1	264	252	262	5600
PS22-MGT3500-CDA	3500	2	1	264	252	262	5600
PS22-MGT4000-CDA	4000	2	1	264	252	262	5600
PS22-MGT5000-CDA	5000	2	1	264	252	262	5600
PS22-MGT6000-CDA	6000	3	1	267	252	467	10500
PS22-MGT8000-CDA	8000	3	1	267	252	467	12000
PS22-MGT9000-CDA	9000	4	1	267	252	467	12000
PS22-MGT10000-CDA	10000	4	1	267	252	467	12000

Pictures (click to enlarge)

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